#Silicidation parameters in Deal-Grove like Specification
#parameters that model the parabolic silicidation constant B

    #PreExponential Term (um^2/min)
    array set $Base {P.l.0 {Double 1.85e11}}

    #Activation Energy Term (eV)
    array set $Base {P.l.e {Double 2.5}}

    #PreExponential Term (um^2/min)
    array set $Base {P.h.0 {Double 7.0}}

    #Activation Energy Term (eV)
    array set $Base {P.h.e {Double 3.0}}

    #Temperature break point for two intersecting Arrhenius lines
    array set $Base {P.break {Double 950}}

    #Pressure Dependence
    array set $Base {P.pdep {Double 1.0}}

#parameters that model the linear silicidation constant B/A

    #PreExponential Term (um/min)
    array set $Base {L.l.0 {Double 30.45e9}}

    #Activation Energy Term (eV)
    array set $Base {L.l.e {Double 1.6}}

    #PreExponential Term (um/min)
    array set $Base {L.h.0 {Double 2.95e8}}

    #Activation Energy Term (eV)
    array set $Base {L.h.e {Double 2.05}}

    #Temperature break point for two intersecting Arrhenius lines
    array set $Base {L.break {Double 900}}

    #Pressure Dependence
    array set $Base {L.pdep {Double 1.0}}

#parameters that model the oxidation reaction

    array set $Base {Henry {Double 3.0e19}}
    array set $Base {Theta {Double 4.4e22}}

#stress dependent oxidation dependencies

    #Stress dependent Diffusivity Volume
    array set $Base {VD {Double 0.0}}

    #Stress dependent Reaction Rate Volume
    array set $Base {VO {Double 0.0}}

#mass transfer velocity of silicon across the silicon/silicide interface.

    array set $Base {MasTrn {Double 1000.0}}

#Parameters for Volume Expansion of silicidation reaction

    #When the silicon consumption is set to one, ticon represents the ratio 
    # of the amount of metal consumed to the amount of silicon consumed. 
    # It allows calculation of the metal consumption rate. 
    array set $Base {SiCon {Double 1.0}}
    array set $Base {TiCon {Double 0.441}}

    #Tisibot and Tisitop then represents a silicide expansion terms
    array set $Base {TiSiBot {Double 1.0}}
    array set $Base {TiSiTop {Double 0.659}}

return { P.l.0 P.l.e P.h.0 P.h.e P.break Par P.pdep L.l.0 L.l.e L.h.0 L.h.e L.break Lin L.pdep Henry Theta VD VO MasTrn SiCon TiCon TiSiBot TiSiTop }
