#Silicidation parameters in Deal-Grove like Specification
#parameters that model the parabolic nitridation constant B

    #PreExponential Term (um^2/min)
    array set $Base {P.l.0 {Double 1.85e10}}

    #Activation Energy Term (eV)
    array set $Base {P.l.e {Double 2.5}}

    #PreExponential Term (um^2/min)
    array set $Base {P.h.0 {Double 1.30}}

    #Activation Energy Term (eV)
    array set $Base {P.h.e {Double 3.0}}

    #Temperature break point for two intersecting Arrhenius lines
    array set $Base {P.break {Double 950}}

    #Pressure Dependence
    array set $Base {P.pdep {Double 1.0}}

#parameters that model the linear nitridation constant B/A

    #PreExponential Term (um/min)
    array set $Base {L.l.0 {Double 30.45e9}}

    #Activation Energy Term (eV)
    array set $Base {L.l.e {Double 1.0}}

    #PreExponential Term (um/min)
    array set $Base {L.h.0 {Double 1.0e8}}

    #Activation Energy Term (eV)
    array set $Base {L.h.e {Double 2.05}}

    #Temperature break point for two intersecting Arrhenius lines
    array set $Base {L.break {Double 900}}

    #Pressure Dependence
    array set $Base {L.pdep {Double 1.0}}

#parameters that model the nitridation reaction

    array set $Base {Henry {Double 3.0e19}}
    array set $Base {Theta {Double 4.4e22}}

#stress dependent nitridation dependencies

    #Stress dependent Diffusivity Volume
    array set $Base {VD {Double 0.0}}

    #Stress dependent Reaction Rate Volume
    array set $Base {VO {Double 0.0}}

#mass transfer velocity of silicon across the titanium/tinitride interface.

    array set $Base {MasTrn {Double 1000000.0}}

return { P.l.0 P.l.e P.h.0 P.h.e P.break Par P.pdep L.l.0 L.l.e L.h.0 L.h.e L.break Lin L.pdep Henry Theta VD VO MasTrn }
